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Hexapod 6-Axis Alignment Systems
PI parallel kinematics (PKM) precision positioning systems have many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size and higher stiffness. With two decades of Hexapod design and manufacturing experience, PI electro-mechanical Piezo Hexapods are the most advanced multi- axis precision positioning systems in the world, providing significantly higher precision than hydraulically driven systems. They are available in many sizes, and configurations for loads from 2 kg to more than 1000 kg, and most are self locking.
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| *Models | Description | Travel Range [mm] | Load Capacity [kg] |
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M-810 | Compact Hexapod. Long travel range, highly precise | to 40 mm / 60° | 5 | ||
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M-824 | Vacuum compatible compact Hexapod. | to 45 mm / 25° |
10 | ||
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M-840 | HexaLightTM Hexapod, fast, medium load capacity, optional photometer. |
to 100 mm / 60° |
10 | ||
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M-850 | High-load hexapod, optional photometer. | to 100 mm / 60° |
200 | ||
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F-206.S | HexAlignTM 6-Axis micro alignment system. Very accurate, optional photometer. |
to 12 mm / 6° |
2 | ||
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N-515K | NEXLINE® Custom, nonmagnetic Piezo-Hexapod high-load 6-axis nanopositioning system | to 10 mm / 6° |
>50 | ||
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M-850 Ultra High Load |
Hexapod ultra high-load 6-axis positioner for astronomy applications and other alignment tasks | to 24 mm / 60° |
1000 | ||
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M-850 Ultra High Load |
Hexapod ultra high-load, 6-axes, long travel, micron precision, 1 ton in any orientation | ±200 mm (X, Y), ±100 mm (Z), ±20° (θX, θY), ±5° (θZ) |
1000 | ||
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M-850KWAH | Custom secondary mirror 6-axis Hexapod alignment system for astronomy, water resistant | to 16 mm | 100 | ||
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M-850KTVH | 6-Axis positioner Parallel-Kinematics system for wide temperature ranges | Ø 350 mm, 330 mm height | 200 | ||
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M-850KLAH | Custom, for inspection systems | to ±25 mm | 200 | ||
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M-880.PD | Tripod 3-axis high-load XYθ stage for LCD and semiconductor inspection | 20 x 20 mm/ 8° | 150 | ||
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M-833 | Tripod 3 axis stage, X,Z and gonimeter (θy) | +/- 25 mm (X,Z) +/-30° (θy) | 4 | ||
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N-510K | Tripod Z-Tip_Tilt nanopositioning platform | 1.3 / 10 mrad | 20 | ||
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 Hexapods Brochure (PDF) More on Hexapods | ||||||
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| Download the Micropositioning and Hexapod PDF Catalog | |||
| Download the Complete PI PDF Catalog | |||
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