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Product details

Dynamic nanopositioning stage nanoSX 800 CAP Oct 3, 2008

Company details

piezosystem jena GmbH
Stockholmer Str. 12

Tel: +49 3641 66880
Fax: +49 3641 668866

Piezosystem jena provides with the nanoSX 800 CAP a new single axis micropositioning and nanoscanning stage.

The system provides unparalleled scanning and stroke capabilities of 800 µm in open loop and 640 µm in closed loop. An integrated capacitative sensor system eliminates hysteresis and drift, and enables extremely high stability, linearity, and repeatability in closed-loop operation.

Due to a special mechanical FEA-optimized design, the actuator has the highest dynamical features that can be achieved. Specially designed solid-state hinges create guidance without friction and without mechanical play.

The design separates guidance and preload, and that is a dual benefit over traditional designs. First, excellent trajectory accuracy demonstrates an improved frequency spectrum; and second, set and reset forces depend only on the piezoceramic’s force generation.


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