Product details
Sirus T2 Table Top Reactive Ion Etch (RIE) System Mar 18, 2011
Company details
Trion Technology
2131 Sunnydale Blvd.
Clearwater
FL
33765
United States
Tel:
+1 727-461-1888
A basic plasma etching system designed to etch dielectrics and other films that require fluorine-based chemistries. The small footprint and robust design make it ideal for the lab environment.